Line: 1 to 1 | ||||||||
---|---|---|---|---|---|---|---|---|
Thin film hybrid in MCM-D technologyProcessing on blank silicon wafers to determine the feasibility of building a fully functional circuit in this technology. The cricuit has five metal layers and hosts 20 front-end ASICS. Electrically it is an exact copy of the silicon tracker upgrade hybrid designed in Liverpool. | ||||||||
Changed: | ||||||||
< < | Specification of first version![]() | |||||||
> > | Specification of first version | |||||||
Changed: | ||||||||
< < | Photos at reception of first thin film hybrid batch![]() | |||||||
> > | Photos at reception of first thin film hybrid batch | |||||||
Changed: | ||||||||
< < | Study of the PWR-GND short![]() | |||||||
> > | Study of the PWR-GND short | |||||||
Post processing of sensor wafer: Run 1Processing on electrical and mechanical grade sensor wafers to investigate the influence on the sensor performance. The processing involved a single metal layer, with the cross-section shown in the figure below. | ||||||||
Changed: | ||||||||
< < | ![]() | |||||||
> > | ![]() | |||||||
Wafer and sensor numbering scheme Run 1The wafers are marked with sensor number at the wafer edge close to the larger straight section of the border. The individual sensors are labelled by their X and Y positions on the wafer. The classification of the wafers and the definition of the wafer number can be found in SensorNumbering.pdf. | ||||||||
Line: 22 to 22 | ||||||||
![]() Electrical measurements of Run 1 | ||||||||
Changed: | ||||||||
< < | Post proton irradiation characterisation (word, pdf) | |||||||
> > | Post proton irradiation characterisation (word, pdf) | |||||||
Changed: | ||||||||
< < | I/V and C/V measurements of all sensors before dicing![]() | |||||||
> > | I/V and C/V measurements of all sensors before dicing | |||||||
Changed: | ||||||||
< < | I/V measurements of all sensors after dicing![]() | |||||||
> > | I/V measurements of all sensors after dicing | |||||||
Changed: | ||||||||
< < | Inter-strip capacitance measurements of all sensors before dicing![]() | |||||||
> > | Inter-strip capacitance measurements of all sensors before dicing | |||||||
Changed: | ||||||||
< < | Capacitance between strip and GND plane![]() | |||||||
> > | Capacitance between strip and GND plane | |||||||
Changed: | ||||||||
< < | Summary of capacitive load measurements![]() | |||||||
> > | Summary of capacitive load measurements | |||||||
Changed: | ||||||||
< < | Inter-strip resistiance![]() | |||||||
> > | Inter-strip resistiance | |||||||
Changed: | ||||||||
< < | Punch-through measurement![]() | |||||||
> > | Punch-through measurement | |||||||
Documentation and photos | ||||||||
Changed: | ||||||||
< < | Photos at reception of the wafers![]() | |||||||
> > | Photos at reception of the wafers | |||||||
Bias bonds on measured wafers | ||||||||
Changed: | ||||||||
< < | Yield measurements![]() | |||||||
> > | Yield measurements | |||||||
Changed: | ||||||||
< < | Reference documents and presentations![]() | |||||||
> > | Reference documents and presentations | |||||||
Mechanical measurements | ||||||||
Changed: | ||||||||
< < | Sensor flatness![]() | |||||||
> > | Sensor flatness | |||||||
Mechanical measurements for Wafers 4 and 17 |