Via yield measurements of Run 1
Measurements of w04 (12 um BCB, mechanical)
Probing double vias on same pad: 24 sensors * 4 pads * 2 vias = 192 vias
No via failures observed
Measurement offset: 2.3 ohm (both needles on the same pad)
Measured resistance: average = 4.5 ohm, sigma = 0.65
Probing the two vias to the bias rail: 26 sensors * 2 vias = 52 vias
No via failures observed
Measurement offset: 2.3 ohm (both needles on the same pad)
Measured resistance: average = 17.5 ohm, sigma = 0.66
Cp-Rp measurement: Checking for opens and shorts
26 sensors * 120 vias = 3120 vias (no opens seen)
26 sensors * 60 pairs = 1560 pairs (no shorts seen)
--
LarsEklund - 16 Dec 2008