Flatness measurement done with interferometer in Glasgow

Scan of 23 frames with 480x640 measurement points in each frame, in a line across the sensor. From this a single line scan is extracted. The plot below shows the result of a line scan across the centre of wafer 04.

Line scan

The output of the instrument specific software is shown here

-- LarsEklund - 14 Jan 2009

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JPEGjpg 2-d_scan.jpg r1 manage 126.6 K 2009-01-14 - 10:09 LarsEklund  
GIFgif LineScan.gif r1 manage 3.9 K 2009-01-14 - 10:34 LarsEklund  
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Topic revision: r2 - 2009-01-19 - LarsEklund
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