After thinnning this wafer suffered damage. The laser scribed ID mark was stuck to the blue tape and could not be released. Upon removal of the wafer from the tape the wafer cracked.
Die that were damaged and returned to Glasgow are: 29, 30 and 39.
Red Die returned to Glasgow for setting up the probe card: 1, 13, 14 and 35
Yellow Die returned to Glasgow for testing the probe card: 36, 43
Green Die returned to Glasgow to confirm that the deposition of the bumps does not affect the ASIC characteristics: 46
The wafer map
The Wafer test results
Pictures of bumps on the wafer from VTT
- 10x -1.jpg: a photo from the chip corner:
- Bumps x20.jpg: a photo using 20 x magnification:
- Cu and solder x50.jpg: Cu residues after the field metal (Cu) etching.:
VTT spotted quite a few of these on the wafer, but they do not seem to be a threat for the bumping yield as they do not form short circuits between the bumps – they look ugly but do no harm. The reason behind the residues can be: a) 50 µm pitch, b) topography around the bump pad or c) something else. As a consequence, we have to prolong the etching time with some seconds.
- Dummy bumps x5.jpg: This photo is from the wafer perimeter, where the ROCs are not complete.:
VTT comment: I just wanted to take a photo from a ROC with a clear id marked with solder bumps.
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RichardBates - 2012-02-22