After thinnning this wafer suffered damage. The laser scribed ID mark was stuck to the blue tape and could not be released. Upon removal of the wafer from the tape the wafer cracked.

Die that were damaged and returned to Glasgow are: 29, 30 and 39.

Red Die returned to Glasgow for setting up the probe card: 1, 13, 14 and 35

Yellow Die returned to Glasgow for testing the probe card: 36, 43

Green Die returned to Glasgow to confirm that the deposition of the bumps does not affect the ASIC characteristics: 46


The wafer map

The Wafer test results


Pictures of bumps on the wafer from VTT

  • 10x -1.jpg: a photo from the chip corner:
    10x_-1.jpg

  • Bumps x20.jpg: a photo using 20 x magnification:
    Bumps_x20.jpg

  • Cu and solder x50.jpg: Cu residues after the field metal (Cu) etching.:
    Cu_and_solder_x50.jpg

VTT spotted quite a few of these on the wafer, but they do not seem to be a threat for the bumping yield as they do not form short circuits between the bumps – they look ugly but do no harm. The reason behind the residues can be: a) 50 µm pitch, b) topography around the bump pad or c) something else. As a consequence, we have to prolong the etching time with some seconds.

  • Dummy bumps x5.jpg: This photo is from the wafer perimeter, where the ROCs are not complete.:
    Dummy_bumps_x5.jpg

VTT comment: I just wanted to take a photo from a ROC with a clear id marked with solder bumps.

-- RichardBates - 2012-02-22

Topic attachments
I Attachment History Action Size Date Who Comment
JPEGjpg 10x_-1.jpg r1 manage 70.1 K 2012-02-22 - 11:14 RichardBates 10x -1.jpg: a photo from the chip corner
JPEGjpg Bumps_x20.jpg r1 manage 56.7 K 2012-02-22 - 11:15 RichardBates Bumps x20.jpg: a photo using 20 x magnification
JPEGjpg Cu_and_solder_x50.jpg r1 manage 33.0 K 2012-02-22 - 11:15 RichardBates Cu and solder x50.jpg: Cu residues after the field metal (Cu) etching.
JPEGjpg Dummy_bumps_x5.jpg r1 manage 81.2 K 2012-02-22 - 11:16 RichardBates Dummy bumps x5.jpg: This photo is from the wafer perimeter, where the ROCs are not complete.
PDFpdf ROW-V6ABC1H-cracked-JS-16-Mar-2012.pdf r1 manage 490.1 K 2012-04-16 - 14:06 RichardBates  
PowerPointppt V6ABC1H.ppt r1 manage 557.0 K 2012-02-22 - 11:11 RichardBates Picture of the wafer map
Microsoft Excel Spreadsheetxlsx WafertestingResults_V6ABC1H.xlsx r1 manage 22.5 K 2012-02-22 - 11:11 RichardBates Probe results
Edit | Attach | Watch | Print version | History: r7 | r4 < r3 < r2 < r1 | Backlinks | Raw View | Raw edit | More topic actions...
Topic revision: r2 - 2012-04-16 - RichardBates
 
This site is powered by the TWiki collaboration platform Powered by PerlCopyright © 2008-2025 by the contributing authors. All material on this collaboration platform is the property of the contributing authors.
Ideas, requests, problems regarding TWiki? Send feedback