MCMDFlatness < DetDev

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---++ Flatness measurement done with interferometer in Glasgow

Scan of 23 frames with 480x640 measurement points in each frame, in a line across the sensor. From this a single line scan is extracted. The plot below shows the result of a line scan across the centre of wafer 04.

<img width="614" alt="Line scan" src="%ATTACHURL%/LineScan.gif" height="414" />

The output of the instrument specific software is shown [[%ATTACHURL%/2-d_scan.jpg][here]]

-- Main.LarsEklund - 14 Jan 2009

Attachments

Topic attachments
I	Attachment	History	Action	Size	Date	Who	Comment
jpg	2-d_scan.jpg	r1	manage	126.6 K	2009-01-14 - 10:09	LarsEklund
gif	LineScan.gif	r1	manage	3.9 K	2009-01-14 - 10:34	LarsEklund

Topic revision: r2 - 2009-01-19 - LarsEklund

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