MCMDCis < DetDev

DetDev Web>ResearchResults>MCMD>MCMDCis (2009-03-04, LarsEklund) (raw view)

---+ Inter-strip capacitance measurments

*Measurements performed by Alex Chilingarov, University of Lancaster and analysis is done by Lars Eklund, University of Glasgow.*

---+++ *Reverse current vs. voltage for w14 (6 um BCB), w09 (12 um BCB) and bare sensors*

For an explanation of the plot legend, see below

<img width="596" alt="I/V curves for w14" src="%ATTACHURL%/w14IV.gif" height="372" />

<img width="596" alt="IV curves" src="%ATTACHURL%/w09IV.gif" height="372" />

<img width="590" alt="I/V of bare sensors" src="%ATTACHURL%/bareIV.gif" height="368" />

---+++ *Reverse current vs. time for w14 (6 um BCB), w09 (12 um BCB) and bare sensors*

For an explanation of the plot legend, see below

<img width="596" alt="I vs time at 600V" src="%ATTACHURL%/w14IvsTime.gif" height="372" />

<img width="596" alt="I vs time at max bias" src="%ATTACHURL%/w09IvsTime.gif" height="372" />

<img width="590" alt="TIme stability of bare sensors" src="%ATTACHURL%/bareIvsTime.gif" height="368" />
---+++ Inter-strip capacitance measurements, w14 (6 um BCB)

Capacitance was measured between one strip and its two nearest neighbours at 100 kHz and 1 MHz.

The measurement consists of a bias voltage ramp, then the sensor is kept at maximal voltage.

See below for plot legend

<img width="596" alt="Cis vs V at 100kHz" src="%ATTACHURL%/w14CisV100kHz.gif" height="372" />

<img width="596" alt="Cis vs V at 1 MHz" src="%ATTACHURL%/w14CisV1MHz.gif" height="372" />

*Plot legend description: XNYM-KK-A/B/C/D-GNDPlaneType*

Coordinates on the wafer are given by *N* and *M* and the number of the measured strip is given by *KK*

The measurements were done in four different configurations of the bias rail connection:

<table width="774" height="84" border="0"><tbody><tr><td style="width: 5%"> *A* </td><td style="width: 60%"> Ampere meter and 1 MOhm connected between bias rail and HV return </td><td style="width: 30%">GND plane floating (DC) <br /></td></tr><tr><td style="width: 10px"> *B* </td><td style="width: 10px"> Ampere meter and 1 MOhm connected between bias rail and HV return</td><td style="width: 10px">GND plane bonded to bias rail <br /></td></tr><tr><td style="width: 10px"> *C* </td><td style="width: 10px"> Bias rail connected directly to HV return<br /></td><td style="width: 10px"> GND plane floating (DC)</td></tr><tr><td style="width: 10px"> *D* </td><td style="width: 10px"> Bias rail connected directly to HV return</td><td style="width: 10px"> GND plane bonded to bias rail </td></tr></tbody></table>

The GND plane types are: <table width="760" height="74" border="0"><tbody><tr><td style="width: 5%"><strong>bcb<br /></strong></td><td style="width: 90%">Sensor covered only by BCB layer (6+3 um)<br /></td></tr><tr><td style="width: 10px"> *m25/30* </td><td style="width: 10px">Sensor with meshed GND plane (25 % fill factor and 30 um line width)<br /></td></tr><tr><td> *m50/30* </td><td> Sensor with meshed GND plane (50 % fill factor and 30 um line width)</td></tr><tr><td> *m50/80* </td><td> Sensor with meshed GND plane (50 % fill factor and 80 um line width)</td></tr><tr><td style="width: 10px"> *solid* </td><td style="width: 10px"> Sensor solid solid GND plane<br /></td></tr><tr><td style="width: 10px"> *bare* </td><td style="width: 10px"> No BCB and no GND plane: sensors from an old production batch </td></tr></tbody></table>

<img width="596" alt="Cis vs time at 100 kHz" src="%ATTACHURL%/w14CisTime100kHz.gif" height="372" />

<img width="596" alt="Cis vs time at 1 MHz" src="%ATTACHURL%/w14CisTime1MHz.gif" height="372" />
---+++ Inter-strip capacitance measurements, w09 (12 um BCB)

Capacitance was measured between one strip and its two nearest neighbours at 100 kHz and 1 MHz.

The measurement consists of a bias voltage ramp, then the sensor is kept at maximal voltage.

See below for plot legend

<img width="596" alt="Cis vs V at 100kHz" src="%ATTACHURL%/w09CisV100kHz.gif" height="372" />

<img width="596" alt="Cis vs V at 1 MHz" src="%ATTACHURL%/w09CisV1MHz.gif" height="372" />

*Plot legend description: XNYM-KK-A/B/C/D-GNDPlaneType*

Coordinates on the wafer are given by *N* and *M* and the number of the measured strip is given by *KK*

The measurements were done in four different configurations of the bias rail connection:

<table width="774" height="84" border="0"><tbody><tr><td style="width: 5%"> *A* </td><td style="width: 60%"> Ampere meter and 1 MOhm connected between bias rail and HV return </td><td style="width: 30%">GND plane floating (DC) <br /></td></tr><tr><td style="width: 10px"> *B* </td><td style="width: 10px"> Ampere meter and 1 MOhm connected between bias rail and HV return</td><td style="width: 10px">GND plane bonded to bias rail <br /></td></tr><tr><td style="width: 10px"> *C* </td><td style="width: 10px"> Bias rail connected directly to HV return<br /></td><td style="width: 10px"> GND plane floating (DC)</td></tr><tr><td style="width: 10px"> *D* </td><td style="width: 10px"> Bias rail connected directly to HV return</td><td style="width: 10px"> GND plane bonded to bias rail </td></tr></tbody></table>

The GND plane types are: <table width="760" height="74" border="0"><tbody><tr><td style="width: 5%"><strong>bcb<br /></strong></td><td style="width: 90%">Sensor covered only by BCB layer (12+3 um)<br /></td></tr><tr><td style="width: 10px"> *m25/30* <br /></td><td style="width: 10px">Sensor with meshed GND plane (25 % fill factor and 30 um line width)<br /></td></tr><tr><td> m50/30</td><td> Sensor with meshed GND plane (50 % fill factor and 30 um line width)</td></tr><tr><td> m50/80</td><td> Sensor with meshed GND plane (50 % fill factor and 80 um line width)</td></tr><tr><td style="width: 10px"> *solid* </td><td style="width: 10px"> Sensor covered by a solid GND plane<br /></td></tr><tr><td style="width: 10px"> *bare* </td><td style="width: 10px"> No BCB and no GND plane: sensors from an old production batch </td></tr></tbody></table>

<img width="596" alt="Cis vs time at 100 kHz" src="%ATTACHURL%/w09CisTime100kHz.gif" height="372" />

<img alt="Cis vs time at 1 MHz" src="%ATTACHURL%/w09CisTime1MHz.gif" />

---+++ Comparison of GND scheme D only, w14 (6 um BCB)

<img width="590" alt="Cis/V 100 kHz scheme D" src="%ATTACHURL%/w14CisV100kHz_SchemeD.gif" height="368" />

<img width="590" alt="Cis/V 1 MHz scheme D" src="%ATTACHURL%/w14CisV1MHz_SchemeD.gif" height="368" />

<img width="590" alt="Cis vs. time, 100 kHz, scheme D" src="%ATTACHURL%/w14CisTime100kHz_SchemeD.gif" height="368" />

---+++ 
---+++ Comparison of sensors without GND plane, w14 (6 um BCB) and bare sensor

<img width="590" alt="Cis/V 100 kHz no GNDP" src="%ATTACHURL%/w14CisV100kHz_NoGNDP.gif" height="368" />

<img width="590" alt="Cis/V 1 MHz no GNDP" src="%ATTACHURL%/w14CisV1MHz_NoGNDP.gif" height="368" />

<img width="590" alt="Cis vs. Time, 1 MHz, no GNDP" src="%ATTACHURL%/w14CisTime1MHz_NoGNDP.gif" height="368" />

<img width="590" alt="Cis vs. time, 100 kHz, no GNDP" src="%ATTACHURL%/w14CisTime100kHz_NoGNDP.gif" height="368" />

<img width="590" alt="Cis vs. Time, 1 MHz, scheme D" src="%ATTACHURL%/w14CisTime1MHz_NoGNDP.gif" height="368" />

---+++ Comparison tables and plots

Summary histogram of Cis for sensors covered by only BCB, BCB plus solid GND plane or nothing (bare). Sensors with ground planes are measurend in two different configurations, A and D at 100 kHz.

<img width="590" alt="Summary histogram of Cis" src="%ATTACHURL%/CisSummaryHisto100kHz.gif" height="368" />

Summary histgram of all different types of ground planes, all measured in configuration D at 100 kHz.

<img width="590" alt="Summary of Cis scheme D" src="%ATTACHURL%/CisSummaryHisto100kHz_D.gif" height="368" />

Summary histogram of Cis for sensors covered by only BCB, BCB plus solid GND plane or nothing (bare). Sensors with ground planes are measurend in two different configurations, A and D at 1 MHz.

<img width="590" alt="Summary histogram of Cis" src="%ATTACHURL%/CisSummaryHisto1MHz.gif" height="368" />

Summary histgram of all different types of ground planes, all measured in configuration D at 1 MHz.

<img width="590" alt="Summary of Cis scheme D" src="%ATTACHURL%/CisSummaryHisto1MHz_D.gif" height="368" />

Summary of the final interstrip capacitance values at 100 kHz for both thicknesses, mean values extracted from the histogram above. The Cis for bare sensors is an upper limit since the value has not yet reached it's plateau value.

<table width="595" height="86" border="0"><tbody><tr><td align="left" valign="middle" style="width: 120px"> Wafer</td><td align="center" valign="middle"> Cis - no BCB<br /></td><td align="center" valign="middle">Cis - only BCB <br /></td><td align="center" valign="middle">Cis - Solid GND (scheme D) </td><td align="center" valign="middle"> Cis - Solid GND (scheme A)<br /></td></tr><tr><td align="left" valign="middle"> w09 (12 um BCB)<br /></td><td rowspan="2" align="center" valign="middle">< 0.92 pF <br /></td><td align="center" valign="middle"> 1. 05pF </td><td align="center" valign="middle"> 0.75 pF<br /></td><td align="center" valign="middle">0.82 pF<br /></td></tr><tr><td align="left" valign="middle"> w14 (6 um BCB)</td><td align="center" valign="middle"> 1.02 pF<br /></td><td align="center" valign="middle"> 0.63 pF<br /></td><td align="center" valign="middle">

0.78 pF
</td></tr></tbody></table>Same table but for 1 MHz measurement frequency

<table width="595" height="86" border="0"><tbody><tr><td align="left" valign="middle" style="width: 120px"> Wafer</td><td align="center" valign="middle"> Cis - no BCB<br /></td><td align="center" valign="middle">Cis - only BCB <br /></td><td align="center" valign="middle">Cis - Solid GND (scheme D) </td><td align="center" valign="middle"> Cis - Solid GND (scheme A)<br /></td></tr><tr><td align="left" valign="middle"> w09 (12 um BCB)<br /></td><td rowspan="2" align="center" valign="middle">< 0.92 pF <br /></td><td align="center" valign="middle"> 1. 08pF </td><td align="center" valign="middle"> 0.75 pF<br /></td><td align="center" valign="middle">0.84 pF<br /></td></tr><tr><td align="left" valign="middle"> w14 (6 um BCB)</td><td align="center" valign="middle"> 1.06 pF<br /></td><td align="center" valign="middle"> 0.63 pF<br /></td><td align="center" valign="middle">

0.85 pF
</td></tr></tbody></table>

-- Main.LarsEklund - 16 Dec 2008

Attachments

Topic attachments
I	Attachment	History	Action	Size	Date	Who
gif	CisSummaryHisto.gif	r6 r5 r4 r3 r2	manage	10.9 K	2009-03-01 - 18:16	LarsEklund
gif	CisSummaryHisto100kHz.gif	r1	manage	10.9 K	2009-03-04 - 22:02	LarsEklund
gif	CisSummaryHisto100kHz_D.gif	r1	manage	10.6 K	2009-03-04 - 22:02	LarsEklund
gif	CisSummaryHisto1MHz.gif	r1	manage	9.2 K	2009-03-04 - 22:02	LarsEklund
gif	CisSummaryHisto1MHz_D.gif	r1	manage	10.9 K	2009-03-04 - 22:02	LarsEklund
gif	CisSummaryHisto_D.gif	r2 r1	manage	9.9 K	2009-03-01 - 18:17	LarsEklund
gif	bareIV.gif	r1	manage	9.3 K	2009-03-01 - 16:26	LarsEklund
gif	bareIvsTime.gif	r1	manage	7.4 K	2009-03-01 - 16:32	LarsEklund
gif	w09CisTime100kHz.gif	r4 r3 r2 r1	manage	10.4 K	2009-03-01 - 16:35	LarsEklund
gif	w09CisTime1MHz.gif	r4 r3 r2 r1	manage	12.3 K	2009-03-01 - 16:35	LarsEklund
gif	w09CisV100kHz.gif	r4 r3 r2 r1	manage	15.3 K	2009-03-01 - 16:36	LarsEklund
gif	w09CisV1MHz.gif	r4 r3 r2 r1	manage	15.1 K	2009-03-01 - 16:37	LarsEklund
gif	w09IV.gif	r3 r2 r1	manage	10.0 K	2009-03-01 - 16:26	LarsEklund
gif	w09IvsTime.gif	r5 r4 r3 r2 r1	manage	7.9 K	2009-03-01 - 16:27	LarsEklund
gif	w14CisTime100kHz.gif	r9 r8 r7 r6 r5	manage	13.3 K	2009-03-04 - 21:36	LarsEklund
gif	w14CisTime100kHz_NoGNDP.gif	r2 r1	manage	10.4 K	2009-03-04 - 21:41	LarsEklund
gif	w14CisTime100kHz_SchemeD.gif	r2 r1	manage	9.7 K	2009-03-04 - 21:37	LarsEklund
gif	w14CisTime1MHz.gif	r10 r9 r8 r7 r6	manage	13.3 K	2009-03-04 - 21:37	LarsEklund
gif	w14CisTime1MHz_NoGNDP.gif	r1	manage	9.9 K	2009-03-01 - 18:19	LarsEklund
gif	w14CisTime1MHz_SchemeD.gif	r2 r1	manage	9.3 K	2009-03-04 - 21:38	LarsEklund
gif	w14CisV100kHz.gif	r9 r8 r7 r6 r5	manage	22.1 K	2009-03-04 - 21:38	LarsEklund
gif	w14CisV100kHz_NoGNDP.gif	r1	manage	12.3 K	2009-03-01 - 18:20	LarsEklund
gif	w14CisV100kHz_SchemeD.gif	r2 r1	manage	15.3 K	2009-03-04 - 21:39	LarsEklund
gif	w14CisV1MHz.gif	r9 r8 r7 r6 r5	manage	21.9 K	2009-03-04 - 21:39	LarsEklund
gif	w14CisV1MHz_NoGNDP.gif	r1	manage	12.0 K	2009-03-01 - 18:19	LarsEklund
gif	w14CisV1MHz_SchemeD.gif	r2 r1	manage	15.2 K	2009-03-04 - 21:40	LarsEklund
gif	w14IV.gif	r8 r7 r6 r5 r4	manage	11.3 K	2009-03-01 - 16:25	LarsEklund
gif	w14IvsTime.gif	r8 r7 r6 r5 r4	manage	9.0 K	2009-03-01 - 16:27	LarsEklund

Topic revision: r19 - 2009-03-04 - LarsEklund

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