Inter-strip capacitance measurments

Measurements performed by Alex Chilingarov, University of Lancaster and analysis is done by Lars Eklund, University of Glasgow.

Reverse current vs. voltage and vs. time, w14 (6 um BCB)

IV curves

Explanation of plot legend, see below

I vs time at 600V

Reverse current vs. voltage and vs. time, w09 (12 um BCB)

IV curves

Explanation of plot legend, see below

I vs time at max bias

Inter-strip capacitance measurements, w14 (6 um BCB)

Capacitance was measured between one strip and its two nearest neighbours at 100 kHz and 1 MHz.

The measurement consists of a bias voltage ramp, then the sensor is kept at maximal voltage.

See below for plot legend

Cis vs V at 100kHz

Cis vs V at 1 MHz

Plot legend description: XNYM-KK-A/B/C/D-GNDPlaneType

Coordinates on the wafer are given by N and M and the number of the measured strip is given by KK

The measurements were done in four different configurations of the bias rail connection:

A Ampere meter and 1 MOhm connected between bias rail and HV return GND plane floating (DC)
B Ampere meter and 1 MOhm connected between bias rail and HV returnGND plane bonded to bias rail
C Bias rail connected directly to HV return
GND plane floating (DC)
D Bias rail connected directly to HV return GND plane bonded to bias rail

The GND plane types are:

bcb
Sensor covered only by BCB layer (6+3 um)
m25/30 Sensor with meshed GND plane (25 % fill factor and 30 um line width)
m50/30 Sensor with meshed GND plane (50 % fill factor and 30 um line width)
m50/80 Sensor with meshed GND plane (50 % fill factor and 80 um line width)
solid Sensor solid solid GND plane
bare No BCB and no GND plane: sensors from an old production batch

Cis vs time at 100 kHz

Cis vs time at 1 MHz

Inter-strip capacitance measurements, w09 (12 um BCB)

Capacitance was measured between one strip and its two nearest neighbours at 100 kHz and 1 MHz.

The measurement consists of a bias voltage ramp, then the sensor is kept at maximal voltage.

See below for plot legend

Cis vs V at 100kHz

Cis vs V at 1 MHz

Plot legend description: XNYM-KK-A/B/C/D-GNDPlaneType

Coordinates on the wafer are given by N and M and the number of the measured strip is given by KK

The measurements were done in four different configurations of the bias rail connection:

A Ampere meter and 1 MOhm connected between bias rail and HV return GND plane floating (DC)
B Ampere meter and 1 MOhm connected between bias rail and HV returnGND plane bonded to bias rail
C Bias rail connected directly to HV return
GND plane floating (DC)
D Bias rail connected directly to HV return GND plane bonded to bias rail

The GND plane types are:

bcb
Sensor covered only by BCB layer (12+3 um)
m25/30
Sensor with meshed GND plane (25 % fill factor and 30 um line width)
m50/30 Sensor with meshed GND plane (50 % fill factor and 30 um line width)
m50/80 Sensor with meshed GND plane (50 % fill factor and 80 um line width)
solid Sensor covered by a solid GND plane
bare No BCB and no GND plane: sensors from an old production batch

Cis vs time at 100 kHz

Cis vs time at 1 MHz

Comparison of GND scheme D w14 only

Comparison tables and plots

Histogram of final values of the inter-strip capacitance. For the solid ground plane sensors the two grounding schemes A and D as described above are included.

Summary histogram of Cis

Summary of the final interstrip capacitance values for both thicknesses, mean values extracted from the histogram above.

Wafer Cis - no BCB
Cis - only BCB
Cis - Solid GND (scheme D) Cis - Solid GND (scheme A)
w09 (12 um BCB)
0.97 pF
1. 05pF 0.75 pF
0.82 pF
w14 (6 um BCB) 1.02 pF
0.63 pF
0.78 pF

-- LarsEklund - 16 Dec 2008

Topic attachments
I Attachment History Action Size Date Who Comment
GIFgif CisSummaryHisto.gif r4 r3 r2 r1 manage 9.9 K 2009-01-21 - 13:13 LarsEklund  
GIFgif w09CisTime100kHz.gif r3 r2 r1 manage 8.8 K 2009-01-21 - 13:13 LarsEklund  
GIFgif w09CisTime1MHz.gif r3 r2 r1 manage 8.9 K 2009-01-21 - 13:14 LarsEklund  
GIFgif w09CisV100kHz.gif r3 r2 r1 manage 13.4 K 2009-01-21 - 13:13 LarsEklund  
GIFgif w09CisV1MHz.gif r3 r2 r1 manage 13.6 K 2009-01-21 - 13:14 LarsEklund  
GIFgif w09IV.gif r1 manage 9.6 K 2009-01-21 - 13:15 LarsEklund  
GIFgif w09IvsTime.gif r4 r3 r2 r1 manage 7.4 K 2009-01-21 - 13:15 LarsEklund  
GIFgif w14CisTime100kHz.gif r7 r6 r5 r4 r3 manage 9.7 K 2009-01-21 - 13:15 LarsEklund  
GIFgif w14CisTime100kHz_GNDD.gif r1 manage 7.7 K 2009-01-21 - 16:12 LarsEklund  
GIFgif w14CisTime1MHz.gif r8 r7 r6 r5 r4 manage 9.8 K 2009-01-21 - 14:50 LarsEklund  
GIFgif w14CisTime1MHz_GNDD.gif r1 manage 7.7 K 2009-01-21 - 16:12 LarsEklund  
GIFgif w14CisV100kHz.gif r7 r6 r5 r4 r3 manage 17.5 K 2009-01-21 - 13:16 LarsEklund  
GIFgif w14CisV100kHz_GNDD.gif r1 manage 10.9 K 2009-01-21 - 16:12 LarsEklund  
GIFgif w14CisV1MHz.gif r7 r6 r5 r4 r3 manage 17.4 K 2009-01-21 - 13:16 LarsEklund  
GIFgif w14CisV1MHz_GNDD.gif r1 manage 11.0 K 2009-01-21 - 16:12 LarsEklund  
GIFgif w14IV.gif r7 r6 r5 r4 r3 manage 10.7 K 2009-01-21 - 13:16 LarsEklund  
GIFgif w14IvsTime.gif r7 r6 r5 r4 r3 manage 8.3 K 2009-01-21 - 13:16 LarsEklund  
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Topic revision: r16 - 2009-01-21 - LarsEklund
 
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