Difference: MCMD (6 vs. 7)

Revision 72008-12-08 - LarsEklund

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META TOPICPARENT name="WebHome"

Wafer and sensor numbering scheme

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 The photos were taken at reception of the wafers, but after wafers w09 and w14 had some of their ground planes bonded to the bias rails. Bond tests and tuning were done on the large metallised area at the bottom of w09. The bonds are visible in the photos. The bias bond locations are described in BiasBonds.pdf.

Full wafer views

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  6 %u03BCm BCB 12 %u03BCm BCB
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  6 um BCB 12 um BCB
 
Electrical w14, w15 w08, w09
Mechanical w17, w18, w19 w04, w05, w16
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  Summary plots of I/V and C/V performance for wafer 09 (12 µm BCB)
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>		The scale of the I/V graph covers the range of 25 of the 26 sensors on wafer 09. Sensor X5Y3 brakes down at low voltages, see separate I/V. Sensors X5Y1, X5Y2 and X5Y4 were ramped to 600 V with leakage current of 40, 33 and 31 nA at 600V. Sensor X5Y1 was kept at 600 V for 30 min and is the only sensor that shows a clear change in reverse current over time, but with signs of saturation. See stability graph.
 I/V characteristics of all sensors

Summary of all C/V on wafer 09

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  Depletion voltage extracted from C/V
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<		The depletion voltage was extracted by fitting a linear function to the 1/C2 vs. Vbias graph between 200 and 400 V. The depletion voltage is defines as the point where the graph deviates more than 3% from that straight line. The depletion voltage is displayed both as a histogram and as a map where the depletion voltage is displayed in its position on the wafer, with coordinates as defined in the figure above.
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>		The depletion voltage was extracted by fitting a linear function to the 1/C2 vs. Vbias graph between 200 and 400 V. The depletion voltage is defines as the point where the graph deviates more than 3% from that straight line. The depletion voltage is displayed both as a histogram and as a map where the depletion voltage is displayed in its position on the wafer, with coordinates as defined in the figure above.Depletion voltage could not be determined for X5Y3 due to its breakdown, hence the histograms include 25 sensors.
  Wafer map of depletion voltages
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>
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