Difference: MCMD (3 vs. 4)

Revision 42008-12-04 - LarsEklund

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Wafer and sensor numbering scheme

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The photos were taken at reception of the wafers, but after wafers w09 and w14 had some of their ground planes bonded to the bias rails. Bond tests and tuning were done on the large metallised area at the bottom of w09. The bonds are visible in the photos. The bias bond locations are described in BiasBonds.pdf.

Full wafer views

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6 μm BCB

12 μm BCB

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6 %u03BCm BCB

12 %u03BCm BCB

Electrical	w14, w15	w08, w09
Mechanical	w17, w18, w19	w04, w05, w16

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Bias resistor connections: resistor via, zoom

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A set of lines with decreasing line width and spacing were put on the mask to assess the resolution of the process. Starting with 10 lines of 5 μm line width and spacing, increasing with 5 μm for each set of lines. As seen in the overview picture all lines down to 10 μm line width and spacing were correctly reproduced. However, the smallest pitch region became merged into one solid metallisation as can be seen in the close-up.

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A set of lines with decreasing line width and spacing were put on the mask to assess the resolution of the process. Starting with 10 lines of 5 %u03BCm line width and spacing, increasing with 5 %u03BCm for each set of lines. As seen in the overview picture all lines down to 10 %u03BCm line width and spacing were correctly reproduced. However, the smallest pitch region became merged into one solid metallisation as can be seen in the close-up.

IV and CV measurments

Summary plots of I/V and C/V performance for wafer 09 (12 µm BCB)

I/V of all sensors on wafer 09

Summary of all C/V on wafer 09

Sensor type	Solid	Triangular	Bare	Mesh 50% 50 um	Mesh 50% 100um	Mesh 25% 37 um
Cs, Rs, I vs. Vbias	X5Y1, X3Y1, X5Y3, X3Y3	X3Y0, X2Y0, X4Y2, X1Y2, X4Y4, X1Y4	X2Y2, X0Y2, X2Y3, X0Y3	X2Y1, X0Y1, X2Y4, X0Y4	X4Y1, X1Y1, X4Y3, X1Y3	X5Y2, X3Y2, X5Y4, X3Y4
Cs, I stability	X5Y1, X3Y1, X5Y3, X3Y3	X3Y0, X2Y0, X4Y2, X1Y2, X4Y4, X1Y4	X2Y2, X0Y2, X2Y3, X0Y3	X2Y1, X0Y1, X2Y4, X0Y4	X4Y1, X1Y1, X4Y3, X1Y3	X5Y2, X3Y2, X5Y4, X3Y4
Environment	X5Y1, X3Y1, X5Y3, X3Y3	X3Y0, X2Y0, X4Y2, X1Y2, X4Y4, X1Y4	X2Y2, X0Y2, X2Y3, X0Y3	X2Y1, X0Y1, X2Y4, X0Y4	X4Y1, X1Y1, X4Y3, X1Y3	X5Y2, X3Y2, X5Y4, X3Y4

-- LarsEklund - 21 Nov 2008

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