Difference: MCMD (2 vs. 3)

Revision 32008-11-21 - LarsEklund

Line: 1 to 1

META TOPICPARENT	name="WebHome"

Wafer and sensor numbering scheme

Line: 14 to 14

Electrical	w14, w15	w08, w09
Mechanical	w17, w18, w19	w04, w05, w16

Changed:

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Close-up views on a few sensors

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Close-up views on a few sensors on w14

Meshed GND plane, full view

Line: 28 to 28

Triangular GND plane, full view

Added:

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Close-up views on a few features on w14

Ground planes: solid, meshed, meshed (bond pad)

Bias and guard ring connections: bias and guard rings, bias ring via, bias bond (triangular), bias bond (meshed)

Strip connections: overview, zoom 1, zoom 2, zoom 3, bond pad, double vias

Bias resistor connections: resistor via, zoom

A set of lines with decreasing line width and spacing were put on the mask to assess the resolution of the process. Starting with 10 lines of 5 μm line width and spacing, increasing with 5 μm for each set of lines. As seen in the overview picture all lines down to 10 μm line width and spacing were correctly reproduced. However, the smallest pitch region became merged into one solid metallisation as can be seen in the close-up.

-- LarsEklund - 21 Nov 2008

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Line: 49 to 61

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Added:

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