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META TOPICPARENT |
name="MCMD" |
Inter-strip capacitance measurments |
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A | Ampere meter and 1 MOhm connected between bias rail and HV return | GND plane floating (DC)
| B | Ampere meter and 1 MOhm connected between bias rail and HV return | GND plane bonded to bias rail
| C | Bias rail connected directly to HV return
| GND plane floating (DC) | D | Bias rail connected directly to HV return | GND plane bonded to bias rail |
|
|
< < | The GND plane types are: bcb
| Sensor covered only by BCB layer (6+3 um)
| M25 | Sensor with meshed GND plane (25 % fill factor and 37 um line width)
| solid | Sensor solid solid GND plane
| bare | No BCB and no GND plane: sensors from an old production batch |
|
> > | The GND plane types are: bcb
| Sensor covered only by BCB layer (6+3 um)
| m25/30 | Sensor with meshed GND plane (25 % fill factor and 30 um line width)
| m50/30 | Sensor with meshed GND plane (50 % fill factor and 30 um line width) | m50/80 | Sensor with meshed GND plane (50 % fill factor and 80 um line width) | solid | Sensor solid solid GND plane
| bare | No BCB and no GND plane: sensors from an old production batch |
|
|
 |
|
A | Ampere meter and 1 MOhm connected between bias rail and HV return | GND plane floating (DC)
| B | Ampere meter and 1 MOhm connected between bias rail and HV return | GND plane bonded to bias rail
| C | Bias rail connected directly to HV return
| GND plane floating (DC) | D | Bias rail connected directly to HV return | GND plane bonded to bias rail |
|
|
< < | The GND plane types are: bcb
| Sensor covered only by BCB layer (12+3 um)
| M50 | Sensor with meshed GND plane (50 % fill factor and 100 um line width)
| solid | Sensor solid solid GND plane
| bare | No BCB and no GND plane: sensors from an old production batch |
|
> > | The GND plane types are: bcb
| Sensor covered only by BCB layer (12+3 um)
| m25/30
| Sensor with meshed GND plane (25 % fill factor and 30 um line width)
| m50/30 | Sensor with meshed GND plane (50 % fill factor and 30 um line width) | m50/80 | Sensor with meshed GND plane (50 % fill factor and 80 um line width) | solid | Sensor covered by a solid GND plane
| bare | No BCB and no GND plane: sensors from an old production batch |
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|
 |
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Summary of the final interstrip capacitance values for both thicknesses, mean values extracted from the histogram above. |
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< < | Wafer | Cis - no BCB
| Cis - only BCB
| Cis - Solid GND (scheme D) | Cis - Solid GND (scheme A)
| w09 (12 um BCB)
| 0.96 pF
| 1. 05pF | 0.75 pF
| 0.82 pF
| w14 (6 um BCB) | 1.02 pF
| 0.63 pF
| 0.78 pF
|
|
> > | Wafer | Cis - no BCB
| Cis - only BCB
| Cis - Solid GND (scheme D) | Cis - Solid GND (scheme A)
| w09 (12 um BCB)
| 0.97 pF
| 1. 05pF | 0.75 pF
| 0.82 pF
| w14 (6 um BCB) | 1.02 pF
| 0.63 pF
| 0.78 pF
|
|
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-- LarsEklund - 16 Dec 2008 |
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< < |
META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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> > |
META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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META FILEATTACHMENT |
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