(r17) MCMD < DetDev

DetDev Web>MCMD (revision 17) (raw view)~~EditAttach~~

---+++ Wafer and sensor numbering scheme

The wafers are marked with sensor number at the wafer edge close to the larger straight section of the border. The individual sensors are labelled by their X and Y positions on the wafer. The classification of the wafers and the definition of the wafer number can be found in [[%ATTACHURL%/SensorNumbering.pdf][SensorNumbering.pdf]].

<img width="422" alt="Sensor number scheme" src="%ATTACHURL%/sensorOverviewNumbered.jpg" height="400" />
---+++ Electrical measurements of Run 1

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDIVCV][I/V and C/V measurements of all sensors before dicing]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDCis][Inter-strip capacitance measurements of all sensors before dicing]]
---+++ Documentation and photos

[[%SCRIPTURL%/edit/DetDev/MCMDPhotos][Photos at reception of the wafers]]

[[%ATTACHURL%/BiasBonds.pdf][Bias bonds on measured wafers]]

[[%SCRIPTURL%/edit/DetDev/MCMDYield][Yield measurements]]
---+++ Mechanical measurements

Sensor flatness

Photos at reception of Run 1 wafers

The photos were taken at reception of the wafers, but after wafers w09 and w14 had some of their ground planes bonded to the bias rails. Bond tests and tuning were done on the large metallised area at the bottom of w09. The bonds are visible in the photos. The bias bond locations are described in [[%ATTACHURL%/BiasBonds.pdf][BiasBonds.pdf.]]

*Full wafer views*
| | 6 um BCB | 12 um BCB |
| Electrical | [[%ATTACHURL%/w14_6umBCBElectrical_atReception.JPG][w14]], [[%ATTACHURL%/w15_6umBCBElectrical_atReception.JPG][w15]] | [[%ATTACHURL%/w08_12umBCBElectrical_atReception.JPG][w08]], [[%ATTACHURL%/w09_12umBCBElectrical_atReception.JPG][w09]] |
| Mechanical | [[%ATTACHURL%/w17_6umBCBMechanical_atReception.JPG][w17]], [[%ATTACHURL%/w18_6umBCBMechanical_atReception.JPG][w18]], [[%ATTACHURL%/w19_6umBCBMechanical_atReception.JPG][w19]] | [[%ATTACHURL%/w04_12umBCBMechanical_atReception.JPG][w04]], [[%ATTACHURL%/w05_12umBCBMechanical_atReception.JPG][w05]], [[%ATTACHURL%/w16_12umBCBMechanical_atReception.JPG][w16]] |

*Close-up views on a few sensors on w14*

[[%ATTACHURL%/meshGNDPlane_w14_X3Y2.JPG][Meshed GND plane, full view]]

[[%ATTACHURL%/meshGNDPlane_w14_X0Y1.JPG][Bias bond, close-up]]

[[%ATTACHURL%/meshGNDPlane_w14_X4Y1.JPG][Meshed GND plane, top half]]

[[%ATTACHURL%/meshGNDPlane_w14_X4Y2.JPG][Meshed GND plane, full view]]

[[%ATTACHURL%/solidGNDPlane_w14_X3Y1.JPG][Solid GND plane, top half]]

[[%ATTACHURL%/triGNDPlane_w14_X3Y0.JPG][Triangular GND plane, full view]]

*Close-up views on a few features on w14*

Ground planes: [[%ATTACHURL%/solidGNDPlane.jpg][solid]], [[%ATTACHURL%/meshedGNDPlane.jpg][meshed]], [[%ATTACHURL%/meshedGNDPlane_withBondPad2.jpg][meshed (bond pad)]]

Bias and guard ring connections: [[%ATTACHURL%/biasGuardRings.jpg][bias and guard rings]], [[%ATTACHURL%/biasRingVia_zoom.JPG][bias ring via]], [[%ATTACHURL%/biasBonds_tri.jpg][bias bond (triangular)]], [[%ATTACHURL%/meshedGNDPlane_withBondPad.jpg][bias bond (meshed)]]

Strip connections: [[%ATTACHURL%/stripPadConnections.jpg][overview]], [[%ATTACHURL%/stripPadConnections_zoom1.jpg][zoom 1]], [[%ATTACHURL%/stripPadConnections_zoom2.jpg][zoom 2]], [[%ATTACHURL%/stripPadConnections_zoom3.jpg][zoom 3]], [[%ATTACHURL%/bondPad.jpg][bond pad]], [[%ATTACHURL%/doubleVias.jpg][double vias]]

Bias resistor connections: [[%ATTACHURL%/biasResVias.jpg][resistor via]], [[%ATTACHURL%/biasResVia_zoom.jpg][zoom]]

A set of lines with decreasing line width and spacing were put on the mask to assess the resolution of the process. Starting with 10 lines of 5 um line width and spacing, increasing with 5 um for each set of lines. As seen in the [[%ATTACHURL%/lineResolution.jpg][overview picture]] all lines down to 10 um line width and spacing were correctly reproduced. However, the smallest pitch region became merged into one solid metallisation as can be seen in the [[%ATTACHURL%/lineResolution_zoom.jpg][close-up]].
---+++ IV and CV measurments

Measurements performed by Alex Chilingarov, University of Lancaster and analysis is done by Lars Eklund, University of Glasgow.

---++++ *Summary plots of I/V and C/V performance for wafer 09 (12 µm BCB)*

The scale of the I/V graph covers the range of 25 of the 26 sensors on wafer 09. Sensor X5Y3 breakes down at low voltages, see [[%ATTACHURL%/X5Y3_IVgraph.gif][separate I/V]]. Sensors X5Y1, X5Y2 and X5Y4 were ramped to 600 V with leakage current of 40, 33 and 31 nA at 600V. Sensor X5Y1 was kept at 600 V for 30 min and is the only sensor that shows a clear change in reverse current over time, but with signs of saturation. See [[%ATTACHURL%/X5Y1_biasStability.gif][stability graph]].

<img width="596" alt="I/V characteristics of all sensors" src="%ATTACHURL%/w09_IVSummary.gif" height="372" />

<img width="596" alt="Summary of all C/V on wafer 09" src="%ATTACHURL%/w09_CVSummary.gif" height="372" />

<img width="596" alt="1/C² vs V graphs for all sensors on w09" src="%ATTACHURL%/w09_1_C2vsV_Summary.gif" height="372" />

<img width="596" alt="Rs vs V summary graph" src="%ATTACHURL%/w09_RsVSummary.gif" height="372" />

<img width="596" alt="" src="%ATTACHURL%/w09I400Map.gif" height="372" />

*Depletion voltage extracted from C/V*

The depletion voltage was extracted by fitting two first order polynomials to the 1/C2 vs. Vbias graph. The first straight line is fitted between 0 and 30 V and the second straight line is fitted between 150 and 400 V. The depletion voltage is defined as the intersection between these two lines. The depletion voltage is displayed both as a histogram and as a map where the depletion voltage is displayed in its position on the wafer, with coordinates as defined in the figure above. The depletion voltage could not be determined for X5Y3 due to its breakdown, hence the histograms include 25 sensors.

<img width="596" alt="Wafer map of depletion voltages" src="%ATTACHURL%/w09_VdepMap.gif" height="372" />

<img width="596" alt="Histogram of measured depletion voltages" src="%ATTACHURL%/w09_VdepHisto.gif" height="372" />
---++++ 
---++++ *Summary plots of I/V and C/V performance for wafer 14 (6 µm BCB)*

Until present 19 sensors have been teste of which 18 are inclueded in the plots. Sensor X0Y4 broke down a very low voltage and is excluded from the analysis presented here.

<img width="596" alt="I/V characteristics of all sensors" src="%ATTACHURL%/w14_IVSummary.gif" height="372" />

<img width="596" alt="Summary of all C/V on wafer 09" src="%ATTACHURL%/w14_CVSummary.gif" height="372" />

<img alt="1/C² vs V graphs for all sensors on w09" src="%ATTACHURL%/w14_1_C2vsV_Summary.gif" />

<img width="596" alt="Rs vs V summary graph" src="%ATTACHURL%/w14_RsVSummary.gif" height="372" />

<img width="596" alt="" src="%ATTACHURL%/w14I400Map.gif" height="372" />

<img width="596" alt="" src="%ATTACHURL%/w14I600Map.gif" height="372" />

*Depletion voltage extracted from C/V*

The depletion voltage was extracted by fitting two first order polynomials to the 1/C2 vs. Vbias graph. The first straight line is fitted between 0 and 30 V and the second straight line is fitted between 150 and 400 V. The depletion voltage is defined as the intersection between these two lines. The depletion voltage is displayed both as a histogram and as a map where the depletion voltage is displayed in its position on the wafer, with coordinates as defined in the figure above. Sensor X0Y4 is not inclued in the depletion voltage plots since it broke down at low voltages.

<img width="596" alt="Wafer map of depletion voltages" src="%ATTACHURL%/w14_VdepMap.gif" height="372" />
---++++ <img width="596" alt="Histogram of measured depletion voltages" src="%ATTACHURL%/w14_VdepHisto.gif" height="372" />

*I/V ramp to 1000 V for two sensors on w14*

<img width="596" alt="I/V up to 1000V for two sensors" src="%ATTACHURL%/w14_IV_1000V.gif" height="372" />

Sensor X5Y1 was kept at 1000V and a break down started to develop at which point it was ramped down immediately

---++++ <img width="596" alt="kkk" src="%ATTACHURL%/w14X5Y1_Istability.gif" height="372" />
---++++ Plots combining the I/V and C/V data for wafer 09 and 14

<img width="596" alt="Combined depletion voltages for wafer 09 nad 14" src="%ATTACHURL%/combined_Vdepl.gif" height="372" />

The following plot show the reverse current at 400 V bias for all measured sensors on wafer 09 and 14.

<img width="596" alt="current at 400 V for all sensors on w 09 and w 14" src="%ATTACHURL%/combined_I400.gif" height="372" />

The following plot shows the reverse current at 400 and 600 V for w 14 for all measured sensors

<img width="596" alt="Current at 400 and 600 V for w14" src="%ATTACHURL%/combined_Iw14.gif" height="372" />

-- Main.LarsEklund - 21 Nov 2008

Attachments

Topic attachments
I	Attachment	History	Action	Size	Date	Who
pdf	BiasBonds.pdf	r1	manage	628.6 K	2008-11-21 - 15:28	LarsEklund
pdf	SensorNumbering.pdf	r1	manage	346.5 K	2008-11-21 - 15:23	LarsEklund
gif	X5Y1_biasStability.gif	r2 r1	manage	11.9 K	2008-12-15 - 16:11	LarsEklund
gif	X5Y3_IVgraph.gif	r1	manage	7.6 K	2008-12-08 - 10:35	LarsEklund
jpg	biasBonds_mesh.jpg	r1	manage	1939.0 K	2008-11-21 - 18:14	LarsEklund
jpg	biasBonds_tri.jpg	r1	manage	1769.3 K	2008-11-21 - 18:14	LarsEklund
jpg	biasGuardRings.jpg	r1	manage	1950.0 K	2008-11-21 - 18:14	LarsEklund
jpg	biasResVia_zoom.jpg	r1	manage	2221.3 K	2008-11-21 - 18:42	LarsEklund
jpg	biasResVias.jpg	r1	manage	1901.1 K	2008-11-21 - 18:15	LarsEklund
jpg	biasRingVia_zoom.JPG	r1	manage	1967.0 K	2008-11-21 - 18:43	LarsEklund
jpg	bondPad.jpg	r1	manage	1897.3 K	2008-11-21 - 18:16	LarsEklund
gif	combined_I400.gif	r3 r2 r1	manage	8.6 K	2008-12-11 - 17:45	LarsEklund
gif	combined_Iw14.gif	r2 r1	manage	9.5 K	2008-12-11 - 17:46	LarsEklund
gif	combined_Vdepl.gif	r4 r3 r2 r1	manage	6.9 K	2008-12-11 - 11:18	LarsEklund
jpg	doubleVias.jpg	r1	manage	1873.4 K	2008-11-21 - 18:16	LarsEklund
jpg	lineResolution.jpg	r1	manage	2707.7 K	2008-11-21 - 18:16	LarsEklund
jpg	lineResolution_zoom.jpg	r1	manage	2238.2 K	2008-11-21 - 18:16	LarsEklund
jpg	meshGNDPlane_w14_X0Y1.JPG	r1	manage	1523.3 K	2008-11-21 - 15:31	LarsEklund
jpg	meshGNDPlane_w14_X3Y2.JPG	r1	manage	2120.5 K	2008-11-21 - 15:31	LarsEklund
jpg	meshGNDPlane_w14_X4Y1.JPG	r1	manage	1977.7 K	2008-11-21 - 15:32	LarsEklund
jpg	meshGNDPlane_w14_X4Y2.JPG	r1	manage	1307.7 K	2008-11-21 - 15:32	LarsEklund
jpg	meshedGNDPlane.jpg	r1	manage	1771.8 K	2008-11-21 - 18:17	LarsEklund
jpg	meshedGNDPlane_withBondPad.jpg	r1	manage	1755.0 K	2008-11-21 - 18:17	LarsEklund
jpg	meshedGNDPlane_withBondPad2.jpg	r1	manage	1874.4 K	2008-11-21 - 18:17	LarsEklund
jpg	sensorOverviewNumbered.jpg	r1	manage	178.0 K	2008-11-21 - 15:25	LarsEklund
jpg	solidGNDPlane.jpg	r1	manage	1707.4 K	2008-11-21 - 18:17	LarsEklund
jpg	solidGNDPlane_w14_X3Y1.JPG	r1	manage	2101.8 K	2008-11-21 - 15:43	LarsEklund
jpg	stripPadConnections.jpg	r1	manage	2016.9 K	2008-11-21 - 18:18	LarsEklund
jpg	stripPadConnections_zoom1.jpg	r1	manage	1871.6 K	2008-11-21 - 18:18	LarsEklund
jpg	stripPadConnections_zoom2.jpg	r1	manage	1982.4 K	2008-11-21 - 18:18	LarsEklund
jpg	stripPadConnections_zoom3.jpg	r1	manage	2468.9 K	2008-11-21 - 18:18	LarsEklund
jpg	triGNDPlane_w14_X3Y0.JPG	r1	manage	2165.5 K	2008-11-21 - 15:43	LarsEklund
jpg	w04_12umBCBMechanical_atReception.JPG	r1	manage	2386.5 K	2008-11-21 - 12:21	LarsEklund
jpg	w05_12umBCBMechanical_atReception.JPG	r1	manage	2448.2 K	2008-11-21 - 12:21	LarsEklund
jpg	w08_12umBCBElectrical_atReception.JPG	r1	manage	2381.8 K	2008-11-21 - 12:24	LarsEklund
gif	w09I400Map.gif	r2 r1	manage	12.1 K	2008-12-11 - 11:19	LarsEklund
jpg	w09_12umBCBElectrical_atReception.JPG	r1	manage	2381.0 K	2008-11-21 - 12:24	LarsEklund
gif	w09_1_C2vsV_Summary.gif	r7 r6 r5 r4 r3	manage	11.8 K	2008-12-10 - 22:48	LarsEklund
gif	w09_CVSummary.gif	r8 r7 r6 r5 r4	manage	10.3 K	2008-12-10 - 22:49	LarsEklund
gif	w09_IVSummary.gif	r12 r11 r10 r9 r8	manage	14.7 K	2008-12-11 - 17:52	LarsEklund
gif	w09_RsVSummary.gif	r7 r6 r5 r4 r3	manage	15.5 K	2008-12-10 - 22:49	LarsEklund
gif	w09_VdepHisto.gif	r8 r7 r6 r5 r4	manage	6.4 K	2008-12-11 - 11:23	LarsEklund
gif	w09_VdepMap.gif	r5 r4 r3 r2 r1	manage	13.3 K	2008-12-10 - 22:50	LarsEklund
gif	w14I400Map.gif	r3 r2 r1	manage	12.0 K	2008-12-11 - 17:47	LarsEklund
gif	w14I600Map.gif	r3 r2 r1	manage	13.0 K	2008-12-11 - 17:47	LarsEklund
gif	w14X5Y1_Istability.gif	r4 r3 r2 r1	manage	7.4 K	2008-12-15 - 16:08	LarsEklund
gif	w14_1_C2vsV_Summary.gif	r4 r3 r2 r1	manage	11.1 K	2008-12-11 - 17:47	LarsEklund
jpg	w14_6umBCBElectrical_atReception.JPG	r1	manage	2357.0 K	2008-11-21 - 12:24	LarsEklund
gif	w14_CVSummary.gif	r4 r3 r2 r1	manage	10.0 K	2008-12-11 - 17:48	LarsEklund
gif	w14_IVSummary.gif	r3 r2 r1	manage	16.6 K	2008-12-11 - 17:48	LarsEklund
gif	w14_IV_1000V.gif	r1	manage	6.3 K	2008-12-11 - 18:21	LarsEklund
gif	w14_RsVSummary.gif	r4 r3 r2 r1	manage	17.7 K	2008-12-11 - 17:49	LarsEklund
gif	w14_VdepHisto.gif	r3 r2 r1	manage	6.4 K	2008-12-11 - 17:49	LarsEklund
gif	w14_VdepMap.gif	r3 r2 r1	manage	13.2 K	2008-12-11 - 17:49	LarsEklund
jpg	w15_6umBCBElectrical_atReception.JPG	r1	manage	2338.5 K	2008-11-21 - 12:24	LarsEklund
jpg	w16_12umBCBMechanical_atReception.JPG	r1	manage	2331.5 K	2008-11-21 - 12:24	LarsEklund
jpg	w17_6umBCBMechanical_atReception.JPG	r1	manage	2367.5 K	2008-11-21 - 12:25	LarsEklund
jpg	w18_6umBCBMechanical_atReception.JPG	r1	manage	2350.4 K	2008-11-21 - 12:25	LarsEklund
jpg	w19_6umBCBMechanical_atReception.JPG	r1	manage	2412.7 K	2008-11-21 - 12:25	LarsEklund

Topic revision: r17 - 2008-12-16 - LarsEklund

DetDev