MCMDYield < DetDev

---++ Via yield measurements of Run 1
---+++ Measurements of w04 (12 um BCB, mechanical)

*Probing double vias on same pad:* 24 sensors * 4 pads * 2 vias = 192 vias

No via failures observed

Measurement offset: 2.3 ohm (both needles on the same pad)

Measured resistance: average = 4.5 ohm, sigma = 0.65

*Probing the two vias to the bias rail:* 26 sensors * 2 vias = 52 vias

No via failures observed

Measurement offset: 2.3 ohm (both needles on the same pad)

Measured resistance: average = 17.5 ohm, sigma = 0.66

*Cp-Rp measurement:* Checking for opens and shorts

26 sensors * 120 vias = 3120 vias (no opens seen)

26 sensors * 60 pairs = 1560 pairs (no shorts seen)

-- Main.LarsEklund - 16 Dec 2008

This topic: DetDev > ResearchResults > MCMD > MCMDYield
Topic revision: r4 - 2009-01-19 - LarsEklund