Photos at reception of Run 1 wafers

The photos were taken at reception of the wafers, but after wafers w09 and w14 had some of their ground planes bonded to the bias rails. Bond tests and tuning were done on the large metallised area at the bottom of w09. The bonds are visible in the photos. The bias bond locations are described in BiasBonds.pdf.

Full wafer views

  6 um BCB 12 um BCB
Electrical w14, w15 w08, w09
Mechanical w17, w18, w19 w04, w05, w16

Close-up views on a few sensors on w14

Meshed GND plane, full view

Bias bond, close-up

Meshed GND plane, top half

Meshed GND plane, full view

Solid GND plane, top half

Triangular GND plane, full view

Close-up views on a few features on w14

Ground planes: solid, meshed, meshed (bond pad)

Bias and guard ring connections: bias and guard rings, bias ring via, bias bond (triangular), bias bond (meshed)

Strip connections: overview, zoom 1, zoom 2, zoom 3, bond pad, double vias

Bias resistor connections: resistor via, zoom

A set of lines with decreasing line width and spacing were put on the mask to assess the resolution of the process. Starting with 10 lines of 5 um line width and spacing, increasing with 5 um for each set of lines. As seen in the overview picture all lines down to 10 um line width and spacing were correctly reproduced. However, the smallest pitch region became merged into one solid metallisation as can be seen in the close-up.

-- LarsEklund - 16 Dec 2008

Topic attachments
I Attachment History Action Size Date Who Comment
JPEGjpg biasBonds_mesh.jpg r1 manage 1939.0 K 2008-11-21 - 18:14 LarsEklund  
JPEGjpg biasBonds_tri.jpg r1 manage 1769.3 K 2008-11-21 - 18:14 LarsEklund  
JPEGjpg biasGuardRings.jpg r1 manage 1950.0 K 2008-11-21 - 18:14 LarsEklund  
JPEGjpg biasResVia_zoom.jpg r1 manage 2221.3 K 2008-11-21 - 18:42 LarsEklund  
JPEGjpg biasResVias.jpg r1 manage 1901.1 K 2008-11-21 - 18:15 LarsEklund  
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JPEGjpg bondPad.jpg r1 manage 1897.3 K 2008-11-21 - 18:16 LarsEklund  
JPEGjpg doubleVias.jpg r1 manage 1873.4 K 2008-11-21 - 18:16 LarsEklund  
JPEGjpg lineResolution.jpg r1 manage 2707.7 K 2008-11-21 - 18:16 LarsEklund  
JPEGjpg lineResolution_zoom.jpg r1 manage 2238.2 K 2008-11-21 - 18:16 LarsEklund  
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Unknown file formatJPG meshGNDPlane_w14_X4Y2.JPG r1 manage 1307.7 K 2008-11-21 - 15:32 LarsEklund  
JPEGjpg meshedGNDPlane.jpg r1 manage 1771.8 K 2008-11-21 - 18:17 LarsEklund  
JPEGjpg meshedGNDPlane_withBondPad.jpg r1 manage 1755.0 K 2008-11-21 - 18:17 LarsEklund  
JPEGjpg meshedGNDPlane_withBondPad2.jpg r1 manage 1874.4 K 2008-11-21 - 18:17 LarsEklund  
JPEGjpg solidGNDPlane.jpg r1 manage 1707.4 K 2008-11-21 - 18:17 LarsEklund  
Unknown file formatJPG solidGNDPlane_w14_X3Y1.JPG r1 manage 2101.8 K 2008-11-21 - 15:43 LarsEklund  
JPEGjpg stripPadConnections.jpg r1 manage 2016.9 K 2008-11-21 - 18:18 LarsEklund  
JPEGjpg stripPadConnections_zoom1.jpg r1 manage 1871.6 K 2008-11-21 - 18:18 LarsEklund  
JPEGjpg stripPadConnections_zoom2.jpg r1 manage 1982.4 K 2008-11-21 - 18:18 LarsEklund  
JPEGjpg stripPadConnections_zoom3.jpg r1 manage 2468.9 K 2008-11-21 - 18:18 LarsEklund  
Unknown file formatJPG triGNDPlane_w14_X3Y0.JPG r1 manage 2165.5 K 2008-11-21 - 15:43 LarsEklund  
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Unknown file formatJPG w14_6umBCBElectrical_atReception.JPG r1 manage 2357.0 K 2008-11-21 - 12:24 LarsEklund  
Unknown file formatJPG w15_6umBCBElectrical_atReception.JPG r1 manage 2338.5 K 2008-11-21 - 12:24 LarsEklund  
Unknown file formatJPG w16_12umBCBMechanical_atReception.JPG r1 manage 2331.5 K 2008-11-21 - 12:24 LarsEklund  
Unknown file formatJPG w17_6umBCBMechanical_atReception.JPG r1 manage 2367.5 K 2008-11-21 - 12:25 LarsEklund  
Unknown file formatJPG w18_6umBCBMechanical_atReception.JPG r1 manage 2350.4 K 2008-11-21 - 12:25 LarsEklund  
Unknown file formatJPG w19_6umBCBMechanical_atReception.JPG r1 manage 2412.7 K 2008-11-21 - 12:25 LarsEklund  

This topic: DetDev > ResearchResults > MCMD > MCMDPhotos
Topic revision: r7 - 2009-03-01 - LarsEklund
 
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