---++ Flatness measurement done with interferometer in Glasgow Scan of 23 frames with 480x640 measurement points in each frame, in a line across the sensor. From this a single line scan is extracted. The plot below shows the result of a line scan across the centre of wafer 17. <img width="614" alt="Line scan" src="%ATTACHURL%/LineScan.gif" height="414" /> The output of the instrument specific software is shown [[%ATTACHURL%/2-d_scan.jpg][here]] -- Main.LarsEklund - 14 Jan 2009
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This topic: DetDev
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MCMDFlatness
Topic revision: r1 - 2009-01-14 - LarsEklund
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