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Thin film hybrid in MCM-D technology

Processing on blank silicon wafers to determine the feasibility of building a fully functional circuit in this technology. The cricuit has five metal layers and hosts 20 front-end ASICS. Electrically it is an exact copy of the silicon tracker upgrade hybrid designed in Liverpool.

Specification of first version

Photos at reception of first thin film hybrid batch

Post processing of sensor wafer: Run 1

Processing on electrical and mechanical grade sensor wafers to investigate the influence on the sensor performance. The processing involved a single metal layer, with the cross-section shown in the figure below.


Wafer and sensor numbering scheme Run 1

The wafers are marked with sensor number at the wafer edge close to the larger straight section of the border. The individual sensors are labelled by their X and Y positions on the wafer. The classification of the wafers and the definition of the wafer number can be found in SensorNumbering.pdf.

Sensor number scheme

Electrical measurements of Run 1

I/V and C/V measurements of all sensors before dicing

I/V measurements of all sensors after dicing

Inter-strip capacitance measurements of all sensors before dicing

Capacitance between strip and GND plane

Summary of capacitive load measurements

Inter-strip resistiance

Punch-through measurement

Documentation and photos

Photos at reception of the wafers

Bias bonds on measured wafers

Yield measurements

Reference documents and presentations

Mechanical measurements

Sensor flatness

Mechanical measurements for Wafers 4 and 17

Sensors w04

Sensors w17

-- LarsEklund - 21 Nov 2008

Topic attachments
I AttachmentSorted ascending History Action Size Date Who Comment
PDFpdf BiasBonds.pdf r1 manage 628.6 K 2008-11-21 - 15:28 LarsEklund  
GIFgif combined_I400.gif r3 r2 r1 manage 8.6 K 2008-12-11 - 17:45 LarsEklund  
GIFgif combined_Iw14.gif r2 r1 manage 9.5 K 2008-12-11 - 17:46 LarsEklund  
GIFgif combined_Vdepl.gif r4 r3 r2 r1 manage 6.9 K 2008-12-11 - 11:18 LarsEklund  
GIFgif CrossSection.gif r1 manage 9.5 K 2010-06-28 - 10:49 LarsEklund  
PDFpdf SensorNumbering.pdf r2 r1 manage 355.7 K 2009-01-10 - 13:17 LarsEklund  
JPEGjpg sensorOverviewNumbered.jpg r1 manage 178.0 K 2008-11-21 - 15:25 LarsEklund  
GIFgif w09_1_C2vsV_Summary.gif r7 r6 r5 r4 r3 manage 11.8 K 2008-12-10 - 22:48 LarsEklund  
GIFgif w09_CVSummary.gif r8 r7 r6 r5 r4 manage 10.3 K 2008-12-10 - 22:49 LarsEklund  
GIFgif w09_IVSummary.gif r12 r11 r10 r9 r8 manage 14.7 K 2008-12-11 - 17:52 LarsEklund  
GIFgif w09_RsVSummary.gif r7 r6 r5 r4 r3 manage 15.5 K 2008-12-10 - 22:49 LarsEklund  
GIFgif w09_VdepHisto.gif r8 r7 r6 r5 r4 manage 6.4 K 2008-12-11 - 11:23 LarsEklund  
GIFgif w09_VdepMap.gif r5 r4 r3 r2 r1 manage 13.3 K 2008-12-10 - 22:50 LarsEklund  
GIFgif w09I400Map.gif r2 r1 manage 12.1 K 2008-12-11 - 11:19 LarsEklund  
GIFgif w14_1_C2vsV_Summary.gif r4 r3 r2 r1 manage 11.1 K 2008-12-11 - 17:47 LarsEklund  
GIFgif w14_CVSummary.gif r4 r3 r2 r1 manage 10.0 K 2008-12-11 - 17:48 LarsEklund  
GIFgif w14_IV_1000V.gif r1 manage 6.3 K 2008-12-11 - 18:21 LarsEklund  
GIFgif w14_IVSummary.gif r3 r2 r1 manage 16.6 K 2008-12-11 - 17:48 LarsEklund  
GIFgif w14_RsVSummary.gif r4 r3 r2 r1 manage 17.7 K 2008-12-11 - 17:49 LarsEklund  
GIFgif w14_VdepHisto.gif r3 r2 r1 manage 6.4 K 2008-12-11 - 17:49 LarsEklund  
GIFgif w14_VdepMap.gif r3 r2 r1 manage 13.2 K 2008-12-11 - 17:49 LarsEklund  
GIFgif w14I400Map.gif r3 r2 r1 manage 12.0 K 2008-12-11 - 17:47 LarsEklund  
GIFgif w14I600Map.gif r3 r2 r1 manage 13.0 K 2008-12-11 - 17:47 LarsEklund  
GIFgif w14X5Y1_Istability.gif r4 r3 r2 r1 manage 7.4 K 2008-12-15 - 16:08 LarsEklund  
GIFgif X5Y1_biasStability.gif r2 r1 manage 11.9 K 2008-12-15 - 16:11 LarsEklund  
GIFgif X5Y3_IVgraph.gif r1 manage 7.6 K 2008-12-08 - 10:35 LarsEklund  
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Topic revision: r30 - 2010-06-28 - LarsEklund
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