MCMD < DetDev

---++ 
---++ Thin film hybrid in MCM-D technology

Processing on blank silicon wafers to determine the feasibility of building a fully functional circuit in this technology. The cricuit has five metal layers and hosts 20 front-end ASICS. Electrically it is an exact copy of the silicon tracker upgrade hybrid designed in Liverpool.

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDHybrid][Specification of first version]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/TFHybPhotos][Photos at reception of first thin film hybrid batch]]
---++ Post processing of sensor wafer: Run 1

Processing on electrical and mechanical grade sensor wafers to investigate the influence on the sensor performance. The processing involved a single metal layer, with the cross-section shown in the figure below.

<img width="589" alt="CrossSection.gif" src="https://ppes8.physics.gla.ac.uk/twiki/pub/DetDev/MCMD/CrossSection.gif" title="CrossSection.gif" height="307" />
---+++ Wafer and sensor numbering scheme Run 1

The wafers are marked with sensor number at the wafer edge close to the larger straight section of the border. The individual sensors are labelled by their X and Y positions on the wafer. The classification of the wafers and the definition of the wafer number can be found in [[%ATTACHURL%/SensorNumbering.pdf][SensorNumbering.pdf]].

<img width="422" alt="Sensor number scheme" src="%ATTACHURL%/sensorOverviewNumbered.jpg" height="400" />
---+++ Electrical measurements of Run 1

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDIVCV][I/V and C/V measurements of all sensors before dicing]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDpostDice][I/V measurements of all sensors after dicing]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDCis][Inter-strip capacitance measurements of all sensors before dicing]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDCsG][Capacitance between strip and GND plane]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDCapSum][Summary of capacitive load measurements]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDRis][Inter-strip resistiance]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDpt][Punch-through measurement]]
---+++ Documentation and photos

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDPhotos][Photos at reception of the wafers]]

[[%ATTACHURL%/BiasBonds.pdf][Bias bonds on measured wafers]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDYield][Yield measurements]]

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDDocs][Reference documents and presentations]]
---+++ Mechanical measurements

[[https://ppes8.physics.gla.ac.uk/twiki/bin/view/DetDev/MCMDFlatness][Sensor flatness]]

---+++ Mechanical measurements for Wafers 4 and 17

[[Sensors w04]]

[[Sensors w17]]

-- Main.LarsEklund - 21 Nov 2008

Attachments

Topic attachments
I	Attachment	History	Action	Size	Date	Who
pdf	BiasBonds.pdf	r1	manage	628.6 K	2008-11-21 - 15:28	LarsEklund
gif	combined_I400.gif	r3 r2 r1	manage	8.6 K	2008-12-11 - 17:45	LarsEklund
gif	combined_Iw14.gif	r2 r1	manage	9.5 K	2008-12-11 - 17:46	LarsEklund
gif	combined_Vdepl.gif	r4 r3 r2 r1	manage	6.9 K	2008-12-11 - 11:18	LarsEklund
gif	CrossSection.gif	r1	manage	9.5 K	2010-06-28 - 10:49	LarsEklund
pdf	SensorNumbering.pdf	r2 r1	manage	355.7 K	2009-01-10 - 13:17	LarsEklund
jpg	sensorOverviewNumbered.jpg	r1	manage	178.0 K	2008-11-21 - 15:25	LarsEklund
gif	w09_1_C2vsV_Summary.gif	r7 r6 r5 r4 r3	manage	11.8 K	2008-12-10 - 22:48	LarsEklund
gif	w09_CVSummary.gif	r8 r7 r6 r5 r4	manage	10.3 K	2008-12-10 - 22:49	LarsEklund
gif	w09_IVSummary.gif	r12 r11 r10 r9 r8	manage	14.7 K	2008-12-11 - 17:52	LarsEklund
gif	w09_RsVSummary.gif	r7 r6 r5 r4 r3	manage	15.5 K	2008-12-10 - 22:49	LarsEklund
gif	w09_VdepHisto.gif	r8 r7 r6 r5 r4	manage	6.4 K	2008-12-11 - 11:23	LarsEklund
gif	w09_VdepMap.gif	r5 r4 r3 r2 r1	manage	13.3 K	2008-12-10 - 22:50	LarsEklund
gif	w09I400Map.gif	r2 r1	manage	12.1 K	2008-12-11 - 11:19	LarsEklund
gif	w14_1_C2vsV_Summary.gif	r4 r3 r2 r1	manage	11.1 K	2008-12-11 - 17:47	LarsEklund
gif	w14_CVSummary.gif	r4 r3 r2 r1	manage	10.0 K	2008-12-11 - 17:48	LarsEklund
gif	w14_IV_1000V.gif	r1	manage	6.3 K	2008-12-11 - 18:21	LarsEklund
gif	w14_IVSummary.gif	r3 r2 r1	manage	16.6 K	2008-12-11 - 17:48	LarsEklund
gif	w14_RsVSummary.gif	r4 r3 r2 r1	manage	17.7 K	2008-12-11 - 17:49	LarsEklund
gif	w14_VdepHisto.gif	r3 r2 r1	manage	6.4 K	2008-12-11 - 17:49	LarsEklund
gif	w14_VdepMap.gif	r3 r2 r1	manage	13.2 K	2008-12-11 - 17:49	LarsEklund
gif	w14I400Map.gif	r3 r2 r1	manage	12.0 K	2008-12-11 - 17:47	LarsEklund
gif	w14I600Map.gif	r3 r2 r1	manage	13.0 K	2008-12-11 - 17:47	LarsEklund
gif	w14X5Y1_Istability.gif	r4 r3 r2 r1	manage	7.4 K	2008-12-15 - 16:08	LarsEklund
gif	X5Y1_biasStability.gif	r2 r1	manage	11.9 K	2008-12-15 - 16:11	LarsEklund
gif	X5Y3_IVgraph.gif	r1	manage	7.6 K	2008-12-08 - 10:35	LarsEklund

This topic: DetDev > ResearchResults > MCMD
Topic revision: r30 - 2010-06-28 - LarsEklund