Difference: MCMDPhotos (6 vs. 7)

Revision 72009-03-01 - LarsEklund

Line: 1 to 1
 
META TOPICPARENT name="MCMD"

Photos at reception of Run 1 wafers

Line: 36 to 36
 A set of lines with decreasing line width and spacing were put on the mask to assess the resolution of the process. Starting with 10 lines of 5 um line width and spacing, increasing with 5 um for each set of lines. As seen in the overview picture all lines down to 10 um line width and spacing were correctly reproduced. However, the smallest pitch region became merged into one solid metallisation as can be seen in the close-up.

-- LarsEklund - 16 Dec 2008 \ No newline at end of file

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