Difference: MCMDFlatness (1 vs. 2)

Revision 22009-01-19 - LarsEklund

Line: 1 to 1
 

Flatness measurement done with interferometer in Glasgow

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Scan of 23 frames with 480x640 measurement points in each frame, in a line across the sensor. From this a single line scan is extracted. The plot below shows the result of a line scan across the centre of wafer 17.
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Scan of 23 frames with 480x640 measurement points in each frame, in a line across the sensor. From this a single line scan is extracted. The plot below shows the result of a line scan across the centre of wafer 04.
  Line scan

The output of the instrument specific software is shown here

-- LarsEklund - 14 Jan 2009

META FILEATTACHMENT attachment="2-d_scan.jpg" attr="" comment="" date="1231927751" name="2-d_scan.jpg" path="2-d_scan.jpg" size="129676" stream="2-d_scan.jpg" tmpFilename="/usr/tmp/CGItemp30100" user="LarsEklund" version="1"
META FILEATTACHMENT attachment="LineScan.gif" attr="" comment="" date="1231929266" name="LineScan.gif" path="LineScan.gif" size="3993" stream="LineScan.gif" tmpFilename="/usr/tmp/CGItemp29976" user="LarsEklund" version="1"
 
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