Difference: MCMD (29 vs. 30)

Revision 302010-06-28 - LarsEklund

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Thin film hybrid in MCM-D technology

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Thin film hybrid in MCM-D technology

Processing on blank silicon wafers to determine the feasibility of building a fully functional circuit in this technology. The cricuit has five metal layers and hosts 20 front-end ASICS. Electrically it is an exact copy of the silicon tracker upgrade hybrid designed in Liverpool.

Specification of first version

  Photos at reception of first thin film hybrid batch
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Post processing of sensor wafer: Run 1

Processing on electrical and mechanical grade sensor wafers to investigate the influence on the sensor performance. The processing involved a single metal layer, with the cross-section shown in the figure below.

CrossSection.gif

 

Wafer and sensor numbering scheme Run 1

The wafers are marked with sensor number at the wafer edge close to the larger straight section of the border. The individual sensors are labelled by their X and Y positions on the wafer. The classification of the wafers and the definition of the wafer number can be found in SensorNumbering.pdf.

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Sensors w17

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Thin film hybrid

Specification of first version

  -- LarsEklund - 21 Nov 2008
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